Autosamdri®-815, Series B

  • The Supercritical Autosamdri®-815, Series B System was developed by Dr. A. J. Tousimis and our team of long-standing associates within the tousimis® SAMDRI design group.

  • Smooth operation and precise control are the Supercritical Autosamdri®-815's trademark; allowing anti-stiction processing of 10mm square die as well as 1" wafers.
  • Process up to 1" wafers
  • Automatic Supercritical Point Dryer
  • Minimal Facility Utility Requirements
  • Made in U.S.A.
tousimis catalog# 8779C
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Application Images

Silicon Microrobots - Elbow hinge University of California at Berkeley and Micropropulsion Corp. USA

Released cantilevers after thermal annealing Universite Catholique de Louvain

Freestanding Cantilever Quantum NanoFab, University of Waterloo

Resistive IR Emitter Device MCNC


  • Microprocessor* controller allows for complete automatic processing.
  • Electromagnetic valves and seals inert to LCO2, alcohols and acetone.
  • Internal surfaces inert to CO2, ultra pure alcohols and acetone.
  • Repeatable operating parameters insuring reproducibility of results.
  • Process up to 5 x 10mm square die or 5 x 1" diameter wafers with every run! (Tousimis HF compatible Wafer/Die Holders* are used to transport and process your MEMS devices minimizing handling).
  • Integrated temperature controls.*
  • Internal rupture disc built in for safety.
  • LED's instantly indicate process mode at a glance.*
  • Clean room static-free compatible design.
  • Complete advanced solid state reliable electronics.
  • Efficient adiabatic cooling system*; cool Process Chamber from room temperature to operational temperature in less than 90 seconds!
  • All electronic components meet CE, UL and/or U.S. Military Specifications.
  • Static pressure control module pre-set for automatic safe pressure stability.
  • 0.08µm internal filtration system delivers clean filtered LCO2 to process chamber. *
  • Under-lit chamber with viewing window facilitates operator chamber status viewing.
  • Vernier Handle Meter Valves allow for repeatable precision flow control.
  • SOTER™ Condenser* connects to Autosamdri®-815, Series B (SOTER™ Condenser quietly separates waste alcohol from exhaust CO2).
  • Cabinet: 14.0" (35.6cm) Width x 10.25" (26.0cm) Height x 21.5" (54.6cm) Length
  • System Set-Up Area Required: 36" (92cm) Width x 30" (76cm) Depth
  • Chamber size: 1.25" I.D. x 1.25" Depth, Chamber volume: 25 ml
  • Temperature gauge range: -30°C to 60°C
  • Pressure gauge range: 0 to 2,000 psi
  • Purge Timer Range: 0 - 45 minutes
  • 120V/50-60Hz (Other voltage units also available. Please Inquire)
  • LCO2 High Pressure braided stainless steel inert Teflon® lined hose. 10ft (~3m) long for clean room operation (at a nominal charge, other lengths available upon request).
  • Double T-Filter Assembly (#8785) pre-installed onto the chamber LCO2 supply high-pressure hose. Flows LCO2 twice thru 0.5µm filters with 99.5% particulate retention prior to LCO2 entering Autosamdri®-815.
  • SOTER™ Condenser* connects to Autosamdri®-815, Series B. Captures all alcohol and deadens exhaust noise.
  • Static free Exhaust Tubing for all exhaust outlets.
  • Internal stainless and nickel scintered filtration systems incorporated to protect lines, wafers, and valves down to 0.08µm.
  • 20 SCFH Flow Meter enables periodic BLEED rate measurement for exact pressure decompression.
  • Spare Chamber O-ring (2), Chamber Lamps (2), and 5A Slo-Blow Fuses (2).
  • 10mm Square HF Compatible Chip Holder* included. This holder can load up to 5 die per process run.
  • Installation Tool Kit included.
  • Free lifetime technical support consultation by our scientific staff.
  • 2 year warranty on all parts and labor.
  • 8760-01: :KNURL NUT for 1.25" Process Chamber
  • 8760-40: :5 AMP FUSE for SAMDRI® Models: PVT-3D, 795, 815, 815B, 915B (Series A & Series B Only)
  • 8770-10: :CHAMBER LAMP, 120Volt/60Hz
  • 8770-32: :HIGH-PRESSURE HOSE, 5ft
  • 8770-33: :HIGH-PRESSURE HOSE, 10ft
  • 8770-50: :CHAMBER LID, for any tousimis SAMDRI® with a 1.25" diameter chambers
  • 8785: :Double T-Filter Assembly
  • 8770-83B: :0.5µm Stainless Steel Particulate Filter Element for LCO2 T-Filter or External Purge Line Filter.
  • 8784-05: :Gasket for LCO2 Tank Connect
  • 8770-51/T: :Teflon® O-Ring for 1.25" Chamber I.D.
  • 8770-45: :Flow Meter - Use with any 1.25" dia. Samdri® Chamber (20 SCFH)
  • 8770-53: :POWER CABLE
  • 8770-56: :Step-Down Transformer, 200-240V → 110-120V, 1000W
  • 8770-83A: :Internal 0.5µm 316SS Particulate Line Filter
  • 8768G: :1" HF Compatible Wafer Holder, Holds 5 Wafers
  • 8768E: :10mm Square HF Compatible Chip Holder, Holds 5 Die

Upcoming Exhibitions and Conferences

Visit us at the 2018 NESM Spring Symposium

Date: April 27, 2018

Location: MBL, Woods Hole, Massatusettss

Visit us at the SEMS 54th annual meeting

Date: May 17, 2018

Location: Courtyard Marriott Downtown Columbia, South Carolina