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Compatible with hydrofluoric acid. Comes with 5 spacers; holds 5 - 6" (150mm) diameter wafers.
For Automegasamdri®-938, Automegasamdri®-936. Automegasamdri®-915B and Automegasamdri®-916B.
Dimensions: 152.9mm (6.02") I.D. / 158.8mm (6.25") O.D. / 25.8mm (1.0") Ht

Additional spacers available. (Order #8768A-01)