Autosamdri®-815, Series B

  • Process up to 1" wafers
  • Automatic Supercritical Point Dryer
  • Minimal Facility Utility Requirements
  • Made in U.S.A.
tousimis catalog# 8779C
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  • The Supercritical Autosamdri®-815, Series B System was developed by Dr. A. J. Tousimis and our team of long-standing associates within the tousimis® SAMDRI design group.

  • Smooth operation and precise control are the Supercritical Autosamdri®-815's trademark; allowing anti-stiction processing of 10mm square die as well as 1" wafers.
  • Microprocessor* controller allows for complete automatic processing.
  • Electromagnetic valves and seals inert to LCO2, alcohols and acetone.
  • Internal surfaces inert to CO2, ultra pure alcohols and acetone.
  • Repeatable operating parameters insuring reproducibility of results.
  • Process up to 5 x 10mm square die or 5 x 1" diameter wafers with every run! (Tousimis HF compatible Wafer/Die Holders* are used to transport and process your MEMS devices minimizing handling).
  • Integrated temperature controls.*
  • Internal rupture disc built in for safety.
  • LED's instantly indicate process mode at a glance.*
  • Clean room static-free compatible design.
  • Complete advanced solid state reliable electronics.
  • Efficient adiabatic cooling system*; cool Process Chamber from room temperature to operational temperature in less than 90 seconds!
  • All electronic components meet CE, UL and/or U.S. Military Specifications.
  • Static pressure control module pre-set for automatic safe pressure stability.
  • 0.08µm internal filtration system delivers clean filtered LCO2 to process chamber. *
  • Under-lit chamber with viewing window facilitates operator chamber status viewing.
  • Vernier Handle Meter Valves allow for repeatable precision flow control.
  • SOTER™ Condenser* connects to Autosamdri®-815, Series B (SOTER™ Condenser quietly separates waste alcohol from exhaust CO2).
  • Cabinet: 14.0" (35.6cm) Width x 10.25" (26.0cm) Height x 21.5" (54.6cm) Length
  • System Set-Up Area Required: 36" (92cm) Width x 30" (76cm) Depth
  • Chamber size: 1.25" I.D. x 1.25" Depth, Chamber volume: 25 ml
  • Temperature gauge range: -30°C to 60°C
  • Pressure gauge range: 0 to 2,000 psi
  • Purge Timer Range: 0 - 45 minutes
  • 120V/50-60Hz (Other voltage units also available. Please Inquire)
Standard Accessories
  • LCO2 High Pressure braided stainless steel inert Teflon® lined hose. 10ft (~3m) long for clean room operation (at a nominal charge, other lengths available upon request).
  • Double T-Filter Assembly (#8785) pre-installed onto the chamber LCO2 supply high-pressure hose. Flows LCO2 twice thru 0.5µm filters with 99.5% particulate retention prior to LCO2 entering Autosamdri®-815.
  • SOTER™ Condenser* connects to Autosamdri®-815, Series B. Captures all alcohol and deadens exhaust noise.
  • Static free Exhaust Tubing for all exhaust outlets.
  • Internal stainless and nickel scintered filtration systems incorporated to protect lines, wafers, and valves down to 0.08µm.
  • 20 SCFH Flow Meter enables periodic BLEED rate measurement for exact pressure decompression.
  • Spare Chamber O-ring (2), Chamber Lamps (2), and 5A Slo-Blow Fuses (2).
  • 10mm Square HF Compatible Chip Holder* included. This holder can load up to 5 die per process run.
  • Installation Tool Kit included.
  • Free lifetime technical support consultation by our scientific staff.
  • 2 year warranty on all parts and labor.
Optional Accessories
  • 8760-01: :KNURL NUT for 1.25" Process Chamber
  • 8760-40: :5 AMP FUSE for SAMDRI® Models: PVT-3D, 795, 815, 815B, 915B (Series A & Series B Only)
  • 8770-10: :CHAMBER LAMP, 120Volt/60Hz
  • 8770-32: :HIGH-PRESSURE HOSE, 5ft
  • 8770-33: :HIGH-PRESSURE HOSE, 10ft
  • 8770-50: :CHAMBER LID, for any tousimis SAMDRI® with a 1.25" diameter chambers
  • 8785: :Double T-Filter Assembly
  • 8770-83B: :0.5µm Stainless Steel Particulate Filter Element for LCO2 T-Filter or External Purge Line Filter.
  • 8784-05: :Gasket for LCO2 Tank Connect
  • 8770-51/T: :Teflon® O-Ring for 1.25" Chamber I.D.
  • 8770-45: :Flow Meter - Use with any 1.25" dia. Samdri® Chamber (20 SCFH)
  • 8770-53: :POWER CABLE
  • 8770-56: :Step-Down Transformer, 200-240V → 110-120V, 1000W
  • 8770-83A: :Internal 0.5µm 316SS Particulate Line Filter
  • 8768G: :1" HF Compatible Wafer Holder, Holds 5 Wafers
  • 8768E: :10mm Square HF Compatible Chip Holder, Holds 5 Die

Application Images

RF MEMS Capacitive Switch NASA-Glenn Research Center/Communications Technology Division, USA

RF MEMS Device Middle East Technical University, Turkey

Solderfan ETH, Switzerland

Thermal Actuated Actuators Universite Catholique de Louvain