Applications
The Samdri® line of Supercritical Point Dryers is successfully used to increase yield and uniformity of MEMS devices. Liquid carbon dioxide is the transitional fluid used to process your delicate MEMS. The tousimis Samdri® line of Supercritical Point Drying tools used for the MEMS CO2 dry release after wet etching is a most beneficial anti-stiction tool for the MEMS fab.

Autosamdri®-934

     

Touchscreen Series C for 4" Wafers

  • Process up to 4" wafers
  • Touchscreen Control Programmable Interface
  • Previous Run Data Review
  • Low LCO2 Consumption
  • Small Foot Print design
  • Made in U.S.A.
tousimis catalog# 8788A

More Information


Automegasamdri®-936

     

Touchscreen Series C for 6" Wafers

  • Process up to 6" wafers
  • Touchscreen Control Programmable Interface
  • Previous Run Data Review
  • Low LCO2 Consumption
  • Small Foot Print design
  • Made in U.S.A.
tousimis catalog# 8788B

More Information


Automegasamdri®-938

     

Touchscreen Series C for 8" Wafers

  • Process up to 8" wafers
  • Touchscreen Control Programmable Interface
  • Previous Run Data Review
  • Low LCO2 Consumption
  • Small Foot Print design
  • Made in U.S.A.
tousimis catalog# 8788C

More Information


Autosamdri®-931

     

Advanced Digital Multi-application Dryer

  • Patent Pending "Stasis Software" for Challenging Sample Types
  • Available in 1.25", 2.50" and 3.40" chamber sizes
  • Winner of 2012 Microscopy Today Innovation Award
  • Built-in Internal Condenser
  • Delicate Slow Fill Path Through for Delicate Samples
  • Precision process control
  • Internal Filtration System Down to 0.08µm
  • Optional "Quick Release" sample holder (down to 2 µm in size)
  • Program and save custom recipes
  • Made in U.S.A.

More Information


  • Process up to 5 x 1" wafers
  • Automatic Supercritical Point Dryer
  • Minimal Facility Utility Requirements
  • Filtration down to 0.08µm
  • Made in U.S.A.
tousimis catalog# 8779C

More Information


  • Process up to 5 x 4" wafers
  • Automatic Supercritical Point Dryer
  • Minimal Facility Utility Requirements
  • Filtration down to 0.08µm
  • Made in U.S.A.
tousimis catalog# 8780C

More Information


  • Process up to 5 x 6" wafers
  • Automatic Supercritical Point Dryer
  • Minimal Facility Utility Requirements
  • Filtration down to 0.08µm
  • Made in U.S.A.
tousimis catalog# 8785C

More Information

Application Images

Thermal Actuated Actuators Universite Catholique de Louvain

Thermal Actuated Actuators Universite Catholique de Louvain

Released cantilevers after thermal annealing Universite Catholique de Louvain

Silicon Microrobots - Leg of Robot University of California at Berkeley and Micropropulsion Corp. USA

Search

Upcoming Exhibitions and Conferences

We are pleased to invite you to MEMS 2018 
 

Booth # 22

Date: January 21-25, 2018

Location: Belfast Waterfront, Belfast, Northern Ireland

Visit us @ EM-UK 2018 
 

tousimis® UK Distributor: Labtech International Ltd.

Date: January 11-12, 2018

Location: Glasgow Science Centre, United Kingdom