Automegasamdri®-915B, Series B

  • The Supercritical Automegasamdri®-915B, Series B System was developed by Dr. A. J. Tousimis and our team of long-standing associates within the tousimis® SAMDRI design group.

  • Smooth operation and precise control are the Supercritical Automegasamdri®-915B´s trademark; wafer holders and inserts are provided that allow anti-stiction processing up to 5 pieces of either 6", 4", 3", 2" wafers or 10mm square die per process run!
  • Process up to 6" wafers
  • Automatic Supercritical Point Dryer
  • Minimal Facility Utility Requirements
  • Made in U.S.A.
tousimis catalog# 8785C
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Application Images

Released cantilevers after thermal annealing Universite Catholique de Louvain

Thermal Actuated Actuators Universite Catholique de Louvain

High aspect ratio silicon gratings Massachusetts Institute of Technology

Freestanding Cantilever Quantum NanoFab, University of Waterloo


  • Clean room static-free compatible design.
  • Microprocessor controller allows for complete automatic processing.*
  • All internal surfaces are inert to CO2 and ultra pure alcohols.*
  • Repeatable operating parameters insuring reproducibility of results.*
  • LED's instantly indicate process mode at a glance.*
  • Integrated temperature controls.*
  • Processes up to 5 x 6" diam. wafers per run; comes with additional HF compatible wafer holders to process 5 x 4", 5 x 3", 5 x 2" diameter wafers or 5 x 10mm square die (Tousimis HF compatible Wafer Holders* can be used to transport and process your wafers and die from HF).
  • All electronic components meet CE, UL and/or U.S. Military Specifications.
  • Internal rupture disc built in for safety.*
  • Static pressure control module pre-set for automatic safe pressure stability.
  • An efficient adiabatic cooling system*, capable of cooling the chamber from ambient room temperature to near 0°C, in less than 3 minutes, maintains temperature automatically during both FILL and PURGE modes.*
  • For added safety and convenience, U.S. Patented SOTER™ Condenser* quietly captures exhaust and alcohols.
  • Under-lit chamber with viewing window facilitates operator chamber status viewing.
  • 0.08µm internal filtration system delivers clean filtered LCO2 to process chamber.*
  • Unique chamber inserts* allow variance of chamber I.D. This maximizes efficiency in LCO2 consumption and processing time.
  • Cabinet: 14.25" (36.2cm) Width x 11.75" (29.8cm) Height x 25" (63.5cm) Length
  • System Set-Up Area Required: 42" (107cm) Width x 30" (76cm) Depth.
  • Chamber size: 6.50" I.D. x 1.25" Depth. Chamber Volume: 679 ml
  • Temperature gauge range: -30°C to 60°C, Pressure gauge range: 0 to 2,000psi
  • 120V/50-60Hz (Other voltage units also available. Please Inquire)
  • LCO2 flow is controlled through Micro Metering Valves with Vernier handles for easily controlled flow rates.*
  • LCO2 High Pressure braided stainless steel inert Teflon® lined hose. 10ft (~3m) long for clean room operation (at a nominal charge, other lengths available upon request).
  • Double T-Filter Assembly (#8785) pre-installed onto the chamber LCO2 supply high-pressure hose. Flows LCO2 twice thru 0.5µm filters with 99.5% particulate retention prior to LCO2 entering Automegasamdri®-915B.
  • New SOTER™ Condenser* connects to exhaust hose. Captures all alcohol and deadens exhaust noise.*
  • Static free Exhaust Tubing for all exhaust outlets.
  • Internal stainless and nickel scintered filtration systems incorporated to protect lines, wafers, and valves down to 0.08µm.
  • Spare Chamber O-ring (3), Chamber Lamps (2), and 5A Slo-Blow Fuses (2).
  • 4 Chamber Inserts.* Enables original chamber ID reduction down to smaller chamber ID sizes for a range including: 6", 4", 3", 2", and 1.25" !
  • 6", 4", 3", 2" diameter Wafer Holders and 10mm square die holders included. Holders are HF compatible and can hold up to 5 wafers or die each.
  • Free lifetime technical support consultation by our scientific staff.
  • 2 year warranty on all parts and labor.
  • 8760-02: :KNURL NUT for 4" and 6" Process Chamber
  • 8760-40: :5 AMP FUSE for SAMDRI® Models: PVT-3D, 795, 815, 815B, 915B (Series A & Series B Only)
  • 8770-10: :CHAMBER LAMP, 120Volt/60Hz
  • 8770-32: :HIGH-PRESSURE HOSE, 5ft
  • 8770-33: :HIGH-PRESSURE HOSE, 10ft
  • 8770-70: :CHAMBER LID for 6" Process Chamber
  • 8785: :Double T-Filter Assembly
  • 8770-83B: :0.5µm Stainless Steel Particulate Filter Element for LCO2 T-Filter or External Purge Line Filter.
  • 8784-05: :Gasket for LCO2 Tank Connect
  • 8770-51T/915B: :O-Ring for Automegasamdri®-936 and Automegasamdri®-915B
  • 8770-47: :Flow Meter - Use with Automegasamdri®-936 and Automegasamdri®-915B (100 SCFH)
  • 8770-53: :POWER CABLE
  • 8770-83A: :Internal 0.5µm 316SS Particulate Line Filter
  • 8768A: :6" HF Compatible Wafer Holder, Holds 5 Wafers
  • 8768F: :5" HF Compatible Wafer Holder, Holds 5 Wafers
  • 8768B: :4" HF Compatible Wafer Holder, Holds 5 Wafers
  • 8768C: :3" HF Compatible Wafer Holder, Holds 5 Wafers
  • 8768D: :2" HF Compatible Wafer Holder, Holds 5 Wafers
  • 8768G: :1" HF Compatible Wafer Holder, Holds 5 Wafers
  • 8768E: :10mm Square HF Compatible Chip Holder, Holds 5 Die