Automegasamdri®-915B, Series B

  • The Supercritical Automegasamdri®-915B, Series B System was developed by Dr. A. J. Tousimis and our team of long-standing associates within the tousimis® SAMDRI design group.

  • Smooth operation and precise control are the Supercritical Automegasamdri®-915B´s trademark; wafer holders and inserts are provided that allow anti-stiction processing up to 5 pieces of either 6", 4", 3", 2" wafers or 10mm square die per process run!
  • Process up to 6" wafers
  • Automatic Supercritical Point Dryer
  • Minimal Facility Utility Requirements
  • Made in U.S.A.
tousimis catalog# 8785C
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Application Images

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  • Clean room static-free compatible design.
  • Microprocessor controller allows for complete automatic processing.*
  • All internal surfaces are inert to CO2 and ultra pure alcohols.*
  • Repeatable operating parameters insuring reproducibility of results.*
  • LED's instantly indicate process mode at a glance.*
  • Integrated temperature controls.*
  • Processes up to 5 x 6" diam. wafers per run; comes with additional HF compatible wafer holders to process 5 x 4", 5 x 3", 5 x 2" diameter wafers or 5 x 10mm square die (Tousimis HF compatible Wafer Holders* can be used to transport and process your wafers and die from HF).
  • All electronic components meet CE, UL and/or U.S. Military Specifications.
  • Internal rupture disc built in for safety.*
  • Static pressure control module pre-set for automatic safe pressure stability.
  • An efficient adiabatic cooling system*, capable of cooling the chamber from ambient room temperature to near 0°C, in less than 3 minutes, maintains temperature automatically during both FILL and PURGE modes.*
  • For added safety and convenience, U.S. Patented SOTER™ Condenser* quietly captures exhaust and alcohols.
  • Under-lit chamber with viewing window facilitates operator chamber status viewing.
  • 0.08µm internal filtration system delivers clean filtered LCO2 to process chamber.*
  • Unique chamber inserts* allow variance of chamber I.D. This maximizes efficiency in LCO2 consumption and processing time.
  • Cabinet: 14.25" (36.2cm) Width x 11.75" (29.8cm) Height x 25" (63.5cm) Length
  • System Set-Up Area Required: 42" (107cm) Width x 30" (76cm) Depth.
  • Chamber size: 6.50" I.D. x 1.25" Depth. Chamber Volume: 679 ml
  • Temperature gauge range: -30°C to 60°C, Pressure gauge range: 0 to 2,000psi
  • 120V/50-60Hz (Other voltage units also available. Please Inquire)
  • LCO2 flow is controlled through Micro Metering Valves with Vernier handles for easily controlled flow rates.*
  • LCO2 High Pressure braided stainless steel inert Teflon® lined hose. 10ft (~3m) long for clean room operation (at a nominal charge, other lengths available upon request).
  • Double T-Filter Assembly (#8785) pre-installed onto the chamber LCO2 supply high-pressure hose. Flows LCO2 twice thru 0.5µm filters with 99.5% particulate retention prior to LCO2 entering Automegasamdri®-915B.
  • New SOTER™ Condenser* connects to exhaust hose. Captures all alcohol and deadens exhaust noise.*
  • Static free Exhaust Tubing for all exhaust outlets.
  • Internal stainless and nickel scintered filtration systems incorporated to protect lines, wafers, and valves down to 0.08µm.
  • Spare Chamber O-ring (3), Chamber Lamps (2), and 5A Slo-Blow Fuses (2).
  • 4 Chamber Inserts.* Enables original chamber ID reduction down to smaller chamber ID sizes for a range including: 6", 4", 3", 2", and 1.25" !
  • 6", 4", 3", 2" diameter Wafer Holders and 10mm square die holders included. Holders are HF compatible and can hold up to 5 wafers or die each.
  • Free lifetime technical support consultation by our scientific staff.
  • 2 year warranty on all parts and labor.
  • 8760-02: :KNURL NUT for 4" and 6" Process Chamber
  • 8760-40: :5 AMP FUSE for SAMDRI® Models: PVT-3D, 795, 815, 815B, 915B (Series A & Series B Only)
  • 8770-10: :CHAMBER LAMP, 120Volt/60Hz
  • 8770-32: :HIGH-PRESSURE HOSE, 5ft
  • 8770-33: :HIGH-PRESSURE HOSE, 10ft
  • 8770-70: :CHAMBER LID for 6" Process Chamber
  • 8785: :Double T-Filter Assembly
  • 8770-83B: :0.5µm Stainless Steel Particulate Filter Element for LCO2 T-Filter or External Purge Line Filter.
  • 8784-05: :Gasket for LCO2 Tank Connect
  • 8770-51T/915B: :O-Ring for Automegasamdri®-936 and Automegasamdri®-915B
  • 8770-47: :Flow Meter - Use with Automegasamdri®-936 and Automegasamdri®-915B (100 SCFH)
  • 8770-53: :POWER CABLE
  • 8770-83A: :Internal 0.5µm 316SS Particulate Line Filter
  • 8768A: :6" HF Compatible Wafer Holder, Holds 5 Wafers
  • 8768F: :5" HF Compatible Wafer Holder, Holds 5 Wafers
  • 8768B: :4" HF Compatible Wafer Holder, Holds 5 Wafers
  • 8768C: :3" HF Compatible Wafer Holder, Holds 5 Wafers
  • 8768D: :2" HF Compatible Wafer Holder, Holds 5 Wafers
  • 8768G: :1" HF Compatible Wafer Holder, Holds 5 Wafers
  • 8768E: :10mm Square HF Compatible Chip Holder, Holds 5 Die

Upcoming Exhibitions and Conferences

Visit us at the 2018 NESM Spring Symposium

Date: April 27, 2018

Location: MBL, Woods Hole, Massatusettss

Visit us at the SEMS 54th annual meeting

Date: May 17, 2018

Location: Courtyard Marriott Downtown Columbia, South Carolina