The Supercritical Automegasamdri®-915B, Series B System was developed by Dr. A. J. Tousimis and our team of long-standing associates within the tousimis® SAMDRI design group.
Smooth operation and precise control are the Supercritical Automegasamdri®-915B´s trademark; wafer holders and inserts are provided that allow anti-stiction processing up to 5 pieces of either 6", 4", 3", 2" wafers or 10mm square die per process run!
Microprocessor controller allows for complete automatic processing.*
All internal surfaces are inert to CO2 and ultra pure alcohols.*
Repeatable operating parameters insuring reproducibility of results.*
LED's instantly indicate process mode at a glance.*
Integrated temperature controls.*
Processes up to 5 x 6" diam. wafers per run; comes with additional HF compatible wafer holders to process 5 x 4", 5 x 3", 5 x 2" diameter wafers or 5 x 10mm square die (Tousimis HF compatible Wafer Holders* can be used to transport and process your wafers and die from HF).
All electronic components meet CE, UL and/or U.S. Military Specifications.
Internal rupture disc built in for safety.*
Static pressure control module pre-set for automatic safe pressure stability.
An efficient adiabatic cooling system*, capable of cooling the chamber from ambient room temperature to near 0°C, in less than 3 minutes, maintains temperature automatically during both FILL and PURGE modes.*
For added safety and convenience, U.S. Patented SOTER Condenser* quietly captures exhaust and alcohols.
Under-lit chamber with viewing window facilitates operator chamber status viewing.
0.08µm internal filtration system delivers clean filtered LCO2 to process chamber.*
Unique chamber inserts* allow variance of chamber I.D. This maximizes efficiency in LCO2 consumption and processing time.
Cabinet: 14.25" (36.2cm) Width x 11.75" (29.8cm) Height x 25" (63.5cm) Length
System Set-Up Area Required: 42" (107cm) Width x 30" (76cm) Depth.
Chamber size: 6.50" I.D. x 1.25" Depth. Chamber Volume: 679 ml
Temperature gauge range: -30°C to 60°C, Pressure gauge range: 0 to 2,000psi
120V/50-60Hz (Other voltage units also available. Please Inquire)
LCO2 flow is controlled through Micro Metering Valves with Vernier handles for easily controlled flow rates.*
LCO2 High Pressure braided stainless steel inert Teflon® lined hose. 10ft (~3m) long for clean room operation (at a nominal charge, other lengths available upon request).
Double T-Filter Assembly (#8785) pre-installed onto the chamber LCO2 supply high-pressure hose. Flows LCO2 twice thru 0.5µm filters with 99.5% particulate retention prior to LCO2 entering Automegasamdri®-915B.
New SOTER Condenser* connects to exhaust hose. Captures all alcohol and deadens exhaust noise.*
Static free Exhaust Tubing for all exhaust outlets.
Internal stainless and nickel scintered filtration systems incorporated to protect lines, wafers, and valves down to 0.08µm.