Supercritical 4" Wafer MEMS Release Tool

Please click for active image 		Autosamdri®-815B, Series C

  • Low LCO2 Consumption.
  • Auto-Process up to 5 - 4" wafers in Less than 1 hour.
  • Small Foot Print design.
  • Minimal Facility Utility Requirements.
  • Unique Patented Features.
tousimis catalog# 8780D

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  • The Autosamdri®-815B, Series C maintains tousimis® process quality and achieves a small facility foot print while utilizing an efficient closed loop refrigeration and waste alcohol collection design.*

  • 35 years of tousimis® CPD experience enables smooth operation and precise control. HF Compatible Wafer Holders* and Chamber Inserts* are provided allowing anti-stiction MEMS processing of various wafer sizes and die.
* Most Samdri®, Autosamdri® and Automegasamdri® feature U.S. patents (#6,493,964, #6,678,968) or patents pending.
Note: Actual delivered model or accessories may vary slightly, as advancements are being applied constantly.
 
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