The Autosamdri®-815B, Series C maintains tousimis® process quality and achieves a small facility foot print while utilizing an efficient closed loop refrigeration and waste alcohol collection design.*
35 years of tousimis® CPD experience enables smooth operation and precise control. HF Compatible Wafer Holders* and Chamber Inserts* are provided allowing anti-stiction MEMS processing of various wafer sizes and die.
* Most Samdri®, Autosamdri® and Automegasamdri® feature U.S. patents (#6,493,964, #6,678,968) or patents pending. Note: Actual delivered model or accessories may vary slightly, as advancements are being applied constantly.