MEMS Application Images
Freestanding Cantilever

Processed by Autosamdri®-815B, Series C
Quantum NanoFab, University of Waterloo (Mary Gopanchuk and Nathan Nelson-Fitzpatrick)

Freestanding Cantilever

Processed by Autosamdri®-815B, Series C
Quantum NanoFab, University of Waterloo (Mary Gopanchuk and Nathan Nelson-Fitzpatrick)

Released cantilevers after thermal annealing

Processed by Automegasamdri®-915B, Series C
Universite Catholique de Louvain (Nicolas André)

Released cantilevers after thermal annealing

Processed by Automegasamdri®-915B, Series C
Universite Catholique de Louvain (Nicolas André)

Thermal Actuated Actuators

Processed by Automegasamdri®-915B, Series C
Universite Catholique de Louvain (Nicolas André)

Thermal Actuated Actuators

Processed by Automegasamdri®-915B, Series C
Universite Catholique de Louvain (Nicolas André)

A flow sensor fabricated using the process flow

Processed by Automegasamdri®-915B, Series C
Universite Catholique de Louvain (Nicolas André)

MEMS Shock Sensor

Processed by Autosamdri®-815B, Series B
Naval Surface Warfare Center Indian Head, MD (Daniel Jean, Ph.D.)

MEMS Shock Sensor (Multi-level)

Processed by Autosamdri®-815B, Series B
Naval Surface Warfare Center Indian Head, MD (Daniel Jean, Ph.D.)

MEMS Shock Sensor (Multi-Directional)

Processed by Autosamdri®-815B, Series B
Naval Surface Warfare Center Indian Head, MD (Daniel Jean, Ph.D.)

High aspect ratio silicon gratings

Processed by Autosamdri®-815B, Series B
Massachusetts Institute of Technology (Minseung Ahn)

High aspect ratio silicon gratings

Processed by Autosamdri®-815B, Series B
Massachusetts Institute of Technology (Minseung Ahn)

Solderfan

Processed by Automegasamdri®-915B, Series B
ETH, Switzerland (Ryan Linderman)

Rotary Microfan with Rotary Motor

Processed by Automegasamdri®-915B, Series B
ETH, Switzerland (Ryan Linderman)

Rotary Motor

Processed by Automegasamdri®-915B, Series B
ETH, Switzerland (Ryan Linderman)

Magnetic Resonance Force Microscope

Processed by Automegasamdri®-915B, Series B
Korea Research Institute of Standards and Science (KRISS), Korea (Jae-Hyuk Choi, Ph. D.)

SEM View of Coupled Oscillators Made of Low Stress Silicon Nitride. 300x

Processed by Automegasamdri®-915B, Series B
Cornell Nanoscale Facility and Department of Applied Physics, USA (Rob Ilic and H.G. Craighead - Craighead Group)

View of Single Coupled Oscillator Made Out of Low Stress Silicon Nitride. 800x

Processed by Automegasamdri®-915B, Series B
Cornell Nanoscale Facility and Department of Applied Physics, USA (Rob Ilic and H.G. Craighead - Craighead Group)

Array of low stress silicon nitride coupled oscillators with gold actuation leads. 1,100x

Processed by Automegasamdri®-915B, Series B
Cornell Nanoscale Facility and Department of Applied Physics, USA (Rob Ilic and H.G. Craighead - Craighead Group)

MEMS Based Resonant Device

Processed by Automegasamdri®-915B, Series B
Cornell Nanoscale Facility and Department of Applied Physics, USA (Rob Ilic and H.G. Craighead - Craighead Group)

Electrostatic Actuator

Processed by Autosamdri®-815B, Series B
MCNC (David Dausch, PhD)

Resistive IR Emitter Device

Processed by Autosamdri®-815B, Series B
MCNC (David Dausch, PhD)

ARTIFICIAL EYELID ACTUATOR

Processed by Autosamdri®-815B, Series B
MCNC (David Dausch, PhD)

ARTIFICIAL EYELID ACTUATOR

Processed by Autosamdri®-815B, Series B
MCNC (David Dausch, PhD)

ARTIFICIAL EYELID ACTUATOR

Processed by Autosamdri®-815B, Series B
MCNC (David Dausch, PhD)

MEMS Electrostatic Comb Drive

Processed by Automegasamdri®-915B, Series B
MEMX, New Mexico, USA ()

MEMS Electrostatic Actuator

Processed by Automegasamdri®-915B, Series B
MEMX, New Mexico, USA ()

RF MEMS Device

Processed by Automegasamdri®-915B, Series B
Middle East Technical University, Turkey (Tayfun Akin)

RF MEMS Device

Processed by Automegasamdri®-915B, Series B
Middle East Technical University, Turkey (Tayfun Akin)

RF MEMS Capacitive Switch

Processed by Automegasamdri®-915B, Series B
NASA-Glenn Research Center/Communications Technology Division, USA (Tayfun Akin)

RF MEMS Capacitive Switch

Processed by Automegasamdri®-915B, Series B
NASA-Glenn Research Center/Communications Technology Division, USA (Tayfun Akin)

E-beam resist pattern quality after CPD Process

Processed by Autosamdri®-815B, Series C
NRL Nano Fab - Washingtopn, DC (Chul-Soo Kim)

E-beam resist pattern quality after CPD Process

Processed by Autosamdri®-815B, Series C
NRL Nano Fab - Washingtopn, DC (Chul-Soo Kim)

Silicon Microrobots - Elbow hinge

Processed by Autosamdri®-815B, Series B
University of California at Berkeley and Micropropulsion Corp. USA (Seth Hollar and Anita Flynn Daniel Jean, Ph.D.)

Silicon Microrobots - Leg of Robot

Processed by Autosamdri®-815B, Series B
University of California at Berkeley and Micropropulsion Corp. USA (Seth Hollar and Anita Flynn Daniel Jean, Ph.D.)

B Lock & Stepper

Processed by Automegasamdri®-915B, Series B
University of California at Los Angeles (Professor William Kaiser)

MEMSJet Drop Ejector

Processed by Automegasamdri®-915B, Series B
XEROX CORPORATION, USA (Joel A. Kubby)

Mechanical Cantilevers

Processed by Autosamdri®-815B, Series B
University of Edinburgh, UK (Stefan Enderling)

Tiltable Microplatform

Processed by Automegasamdri®-915B, Series B
University of Michigan at Ann Arbor, Department of Engineering (Yuan Xie, Ph.D.)

Resonator

Processed by Automegasamdri®-915B, Series B
VTT Technologies, Finland (Jyrki Kiihamaki, Senior Research Scientist)

A Sensor for Acoustic Emission

Processed by Automegasamdri®-915B, Series B
VTT Technologies, Finland (Jyrki Kiihamaki, Senior Research Scientist)

Visit our Chinese Distibutor, Tansi Technology at the 2024 Beijing EM Annual Conference

Booth # 32

Date: December 18, 2024

Location: Banquet Hall on the Second Floor of Zhongfu Building ,No. 18 Gongti East Road,Chaoyang District, Beijing

Visit us at The 38th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2025)

Booth # 10

Date: January 20-23, 2025

Location: Kaohsiung Exhibition Center, Kaohsiung, Taiwan