tousimis Autosamdri®-931 - Cleanroom Versions

Cleanroom vs Non-Cleanroom

FEATURES

Cleanroom Material Fabricated Static Free Design
Bright LCD Touchscreen Control
Default "Automode" setting suitable for most wafer and die MEMS applications
Process up to 5 substrates per process run (either Wafers or Die)
HF Compatible Holder(s) included with system (see Chamber Size Options below)
Create and save custom Recipes exactly for your specific sample needs
Easy View Placement of Micro Metering Valves with Vernier Handles
Slow Fill feature protects the most delicate samples
Fast adiabatic chamber cooling (Less than one minute for the 1.25" chamber)
Maintenance Free Non-Mechanical Vortex Swirl™ Purge Stirring
External 0.5µm Post-Purge filter access for easy preventive maintenance
External LCO2 tank supply particulate filtration using 'Double T-Filter' design with 99.5%+ retention
Internal filtration delivers filtered LCO2 down to 0.08µm with 99.999+% retention directly into process chamber
Internal SOTER™ Condenser quietly separates waste alcohol and CO2 while eliminating any freeze up or static discharge
EZ top loading process chamber with LED illumination
"Stasis Software" for drying GELS and other challenging sample types
Post Process Previous Run Data Review
All components meet CE, UL and/or U.S. Military specifications
2 year warranty on all parts and labor
Made in U.S.A.

SPECIFICATIONS

Cabinet: (W) 15.0" (38.0cm) x (H) 13.25" (33.5cm) x (D) 20" (50.8cm)
System Set-Up Area Required: (W) 24" (61cm) x (D) 22" (56cm)
Chamber Size (Available in three sizes):

1.25" ID x 1.25" Depth (31.75mm ID x 31.75mm Depth) - 25 ml Volume
2.50" ID x 1.25" Depth (63.50mm ID x 31.75mm Depth) - 100 ml Volume
3.40" ID x 1.25" Depth (86.36mm ID x 31.75mm Depth) - 186 ml Volume

Pressure Gauge Range: 0- 2000 psi, Temperature Range - 30°C to 60°C
120V or 220V Models Available

STANDARD ACCESSORIES

Flexible High-Pressure LCO2 Supply Hose, 10ft (3.0m)
Note: Other lengths available upon request up to 50ft (15m)
HF Compatible Substrate Holders included (see Chamber Size Options below)
Chamber insert included for 2.50" chamber and 3.40" chamber to reduce the chamber size down to 1.25"
Double T-Filter Assembly (#8785) pre-installed onto the LCO2 high-pressure hose. LCO2 filtered twice thru 0.5µm filters prior to LCO2 entering Autoamdri®-931 process chamber
Static Free Exhaust Tubing
Flow Meter supplied allows precise BLEED Exhaust Calibration
Spare chamber O-rings (2), LED chamber lamp (1), and 5A slo-blow fuses (2)
User Manual and Check-Out Data Sheet
Installation Tool Kit
Free lifetime technical support

OPTIONAL ACCESSORIES

For all Autosamdri®-931

8760-40: 5 AMP FUSE for SAMDRI® and Autosamdri®
8770-13: LED CHAMBER LAMP for SAMDRI® and Autosamdri® (120V/60Hz)
8770-33: HIGH-PRESSURE HOSE, 10ft
8770-HPS: HIGH-PRESSURE HOSE - Custom lengths available upon request
8785: Double T-Filter Assembly
8784-05: Gasket for LCO2 Tank Connect
8770-83B: 0.5µm Stainless Steel Particulate Filter Element for LCO2 T-Filter or External Purge Line Filter
8770-53: POWER CABLE
8770-54: LCO₂ TANK SCALE W/ REMOTE READOUT
8770-94: Carboy, 1 gal capacity with 2 quick connect 1/4" hose barbs
8770-95: Carboy, 2.5 gal capacity with 2 quick connect 1/4" hose barbs

For all Autosamdri®-931 with 1.25in Chamber

8770-51/T: Teflon® O-Ring for 1.25" Chamber I.D. for Autosamdri®-931 (Cleanroom version)
8770-45: Flow Meter - Use with any 1.25" dia. Samdri® Chamber (20 SCFH)

For all Autosamdri®-931 with 2.5in Chamber

8770-51/S25T: Teflon® O-Ring for Autosamdri®-931 with 2.50" I.D. Chamber (Cleanroom version)
8770-51/S25T-BR: Backing Ring for 2.50" Chamber I.D.
8770-46: Flow Meter - Use with any 2.50", 3.40" and 4.0" dia. Autosamdri® Chamber (60 SCFH)

For all Autosamdri®-931 with 3.4in Chamber

8770-51/S34T: Teflon® O-Ring for 3.40" Chamber I.D.
8770-51/S34T-BR: Backing Ring for 3.40" Chamber I.D.
8770-46: Flow Meter - Use with any 2.50", 3.40" and 4.0" dia. Autosamdri® Chamber (60 SCFH)

CPD MULTI-APPLICATIONS

Autosamdri®-931 - Cleanroom Versions

CPD Multi-Applications

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Cleanroom vs Non-Cleanroom

Chamber Size Options

3.40" Chamber

Cat.# 8787F

2.50" Chamber

Cat.# 8787E

1.25" Chamber

Cat.# 8787D

Autosamdri®-931 - 1.25" Chamber

1.25" Chamber Size

1.25" Chamber with a 10mm Square HF Compatible Chip Holder

Autosamdri®-931 - 2.50" Chamber

2.50" Chamber Size

2.50" Chamber with a 2" (50mm) HF Compatible Wafer Holder

2.50" Chamber with a Chamber Insert

2.50" Chamber with a Chamber Insert and a 10mm Square HF Compatible Chip Holder

Autosamdri®-931 - 3.40" Chamber

3.40" Chamber with a 1" (25mm) HF Compatible Wafer Holder and a 10mm Square HF Compatible Chip Holder

3.40" Chamber with a 2" (50mm) HF Compatible Wafer Holder

3.40" Chamber with a 10mm Square HF Compatible Chip Holder

3.40" Chamber with a chamber insert

3.40" Chamber with a chamber insert and a 10mm Square HF Compatible Chip Holder

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