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Compatible with hydrofluoric acid. Comes with 5 spacers; holds 5 - 8" (200mm) diameter wafers.
For Automegasamdri®-938 amd Automegasamdri®-916B.
Dimensions: 203.7mm (8.02") I.D. / 209.6mm (8.25") O.D. / 25.8mm (1.0") Ht

Additional spacers available. (Order #8768H-01)

8" (200mm) HF Compatible Wafer Spacer Rings

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Compatible with hydrofluoric acid. Comes with 5 spacers; holds 5 - 6" (150mm) diameter wafers.
For Automegasamdri®-938, Automegasamdri®-936. Automegasamdri®-915B and Automegasamdri®-916B.
Dimensions: 152.9mm (6.02") I.D. / 158.8mm (6.25") O.D. / 25.8mm (1.0") Ht

Additional spacers available. (Order #8768A-01)

6" (150mm) HF Compatible Wafer Spacer Rings

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Compatible with hydrofluoric acid. Comes with 5 spacers; holds 5 - 5" (125mm) diameter wafers.
Dimensions: 127.5mm (5.02") I.D. / 133.4mm (5.25") O.D. / 25.8mm (1.0") Ht

Additional spacers available. (Order #8768F-01)

5" (125mm) HF Compatible Wafer Spacer Rings

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Compatible with hydrofluoric acid. Comes with 5 spacers; holds 5 - 4" (100mm) diameter wafers.
Dimensions: 102.1mm (4.02") I.D. / 108mm (4.25") O.D. / 25.8mm (1.0") Ht

Additional spacers available. (Order #8768B-01)

4" (100mm) HF Compatible Wafer Spacer Rings

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Compatible with hydrofluoric acid. Comes with 5 spacers; holds 5 - 3" (75mm) diameter wafers.
Dimensions: 76.7mm (3.02") I.D. / 82.6mm (3.25") O.D. / 25.8mm (1.0") Ht

Additional spacers available. (Order #8768C-01)

3" (75mm) HF Compatible Wafer Spacer Rings

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Compatible with hydrofluoric acid. Comes with 5 spacers; holds 5 - 2" (50mm) diameter wafers.
Dimensions: 51.3mm (2.02") I.D. / 57.2mm (2.25") O.D. / 25.8mm (1.0") Ht

Additional spacers available. (Order #8768D-01)

2" (50mm) HF Compatible Wafer Spacer Rings

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Compatible with hydrofluoric acid. Comes with 5 spacers; holds 5 - 1" (25mm) diameter wafers.
Dimensions: 25.9mm (1.02") I.D. / 31.8mm (1.25") O.D. / 25.8mm (1.0") Ht

Click here for detailed User-Instructions

Securely holds up to 5 die measuring 10mm x 10mm square in the vertical position. A threaded cap helps protect your delicate devices during processing. There are numerous flow-thru holes for efficient liquid exchange. The HF compatible material enables safe dry loading of your die into this holder so that you can then immerse them directly into wet baths as per your pre-CPD wet etch-chemistry protocol. Transferring from wet baths into the CPD process chamber is a smooth process. It is then easy to safely remove your die upon process completion and take them to the next step!
Dimensions: 30mm (1.18") O.D. / 28mm (1.10") Ht
Recommended substrate thickness: 525µm - 725µm
HF compatible carrying handle included with holder