Automegasamdri®-915B, Series B
- The Supercritical Automegasamdri®-915B, Series B System was developed by Dr. A. J. Tousimis and our team of long-standing associates within the tousimis® SAMDRI design group.
- Smooth operation and precise control are the Supercritical Automegasamdri®-915B´s trademark; wafer holders and inserts are provided that allow anti-stiction processing up to 5 pieces of either 6" (150mm), 4" (100mm), 3" (75mm), 2" (50mm) wafers or 10mm square die per process run!
- Process up to 6" (150mm) wafers
- Automatic Supercritical Point Dryer
- Minimal Facility Utility Requirements
- Made in U.S.A.
Application Images
Released cantilevers after thermal annealing Universite Catholique de Louvain
Silicon Microrobots - Elbow hinge University of California at Berkeley and Micropropulsion Corp. USA
RF MEMS Capacitive Switch NASA-Glenn Research Center/Communications Technology Division, USA
- Clean room static-free compatible design.
- Microprocessor controller allows for complete automatic processing.*
- All internal surfaces are inert to CO2 and ultra pure alcohols.*
- Repeatable operating parameters insuring reproducibility of results.*
- LED's instantly indicate process mode at a glance.*
- Integrated temperature controls.*
- Processes up to 5 x 6" (150mm) diam. wafers per run; comes with additional HF compatible wafer holders to process 5 x 4" (100mm), 5 x 3" (75mm), 5 x 2" (50mm) diameter wafers or 5 x 10mm square die (Tousimis HF compatible Wafer Holders* can be used to transport and process your wafers and die from HF).
- All electronic components meet CE, UL and/or U.S. Military Specifications.
- Internal rupture disc built in for safety.*
- Static pressure control module pre-set for automatic safe pressure stability.
- An efficient adiabatic cooling system*, capable of cooling the chamber from ambient room temperature to near 0°C, in less than 3 minutes, maintains temperature automatically during both FILL and PURGE modes.*
- For added safety and convenience, U.S. Patented SOTER™ Condenser* quietly captures exhaust and alcohols.
- Under-lit chamber with viewing window facilitates operator chamber status viewing.
- 0.08µm internal filtration system delivers clean filtered LCO2 to process chamber.*
- Unique chamber inserts* allow variance of chamber I.D. This maximizes efficiency in LCO2 consumption and processing time.
- Cabinet: 14.25" (36.2cm) Width x 11.75" (29.8cm) Height x 25" (63.5cm) Length
- System Set-Up Area Required: 42" (107cm) Width x 30" (76cm) Depth.
- Chamber size: 6.50" I.D. x 1.25" Depth. Chamber Volume: 679 ml
- Temperature gauge range: -30°C to 60°C, Pressure gauge range: 0 to 2,000psi
- 120V/50-60Hz (Other voltage units also available. Please Inquire)
- LCO2 flow is controlled through Micro Metering Valves with Vernier handles for easily controlled flow rates.*
- LCO2 High Pressure braided stainless steel inert Teflon® lined hose. 10ft (~3m) long for clean room operation (at a nominal charge, other lengths available upon request).
- Double T-Filter Assembly (#8785) pre-installed onto the chamber LCO2 supply high-pressure hose. Flows LCO2 twice thru 0.5µm filters with 99.5% particulate retention prior to LCO2 entering Automegasamdri®-915B.
- New SOTER™ Condenser* connects to exhaust hose. Captures all alcohol and deadens exhaust noise.*
- Static free Exhaust Tubing for all exhaust outlets.
- Internal stainless and nickel scintered filtration systems incorporated to protect lines, wafers, and valves down to 0.08µm.
- Spare Chamber O-ring (3), Chamber Lamp (1), and 5A Slo-Blow Fuses (2).
- 4 Chamber Inserts.* Enables original chamber ID reduction down to smaller chamber ID sizes for a range including: 6", 4", 3", 2", and 1.25" !
- 6" (150mm), 4" (100mm), 3" (75mm), 2" (50mm) diameter Wafer Holders and 10mm square die holders included. Holders are HF compatible and can hold up to 5 wafers or die each.
- Free lifetime technical support consultation by our scientific staff.
- 2 year warranty on all parts and labor.
- 8760-02: :KNURL NUT for 4" and 6" Process Chamber
- 8760-40: :5 AMP FUSE for SAMDRI® Models: PVT-3D, 795, 815, 815B, 915B (Series A & Series B Only)
- 8770-10: :CHAMBER LAMP, 120Volt/60Hz
- 8770-32: :HIGH-PRESSURE HOSE, 5ft
- 8770-33: :HIGH-PRESSURE HOSE, 10ft
- 8770-70: :CHAMBER LID for 6" Process Chamber
- 8785: :Double T-Filter Assembly
- 8770-83B: :0.5µm Stainless Steel Particulate Filter Element for LCO2 T-Filter or External Purge Line Filter.
- 8784-05: :Gasket for LCO2 Tank Connect
- 8770-51T/915B: :O-Ring for Automegasamdri®-936 and Automegasamdri®-915B
- 8770-47: :Flow Meter - Use with Automegasamdri®-936 and Automegasamdri®-915B (100 SCFH)
- 8770-53: :POWER CABLE
- 8770-54: :LCO2 TANK SCALE W/ REMOTE DISPLAY
- 8770-56A: :Step-Down Transformer, 200-240V → 110-120V, 3000W
- 8770-83A: :Internal 0.5µm 316SS Particulate Line Filter
- 8768A: :6" - 150mm HF Compatible Wafer Holder
Holds 5 Wafers - 8768F: :5" - 125mm HF Compatible Wafer Holder
Holds 5 Wafers - 8768B: :4" - 100mm HF Compatible Wafer Holder
Holds 5 Wafers - 8768C: :3" - 75mm HF Compatible Wafer Holder
Holds 5 Wafers - 8768D: :2" - 50mm HF Compatible Wafer Holder
Holds 5 Wafers - 8768G: :1" - 25mm HF Compatible Wafer Holder
Holds 5 Wafers - 8768E: :10mm Square HF Compatible Chip Holder, Holds 5 Die
Hall C2, Booth no. 501
Date: November 12–15, 2024
Location: MESSE, Munich, Germany
Date: November 25–26, 2024
Location: Gyeongju Hwabaek International Convention Center, Korea
Booth # 10
Date: January 20-23, 2025
Location: Kaohsiung Exhibition Center, Kaohsiung, Taiwan