Autosamdri®-815B, Series B
Application Images
E-beam resist pattern quality after CPD Process NRL Nano Fab - Washingtopn, DC
B Lock & Stepper University of California at Los Angeles
MEMS Electrostatic Actuator MEMX, New Mexico, USA
MEMS Electrostatic Comb Drive MEMX, New Mexico, USA
Date: August 25-30, 2024
Location: Bella Center, Copenhagen, Denmark
Date: October 15-18, 2024
Location: Kurhaus Wiesbaden, Wiesbaden, Germany