tousimis Critical Point Dryers - Automegasamdri®-915B, Series B

Clean room static-free compatible design.
Microprocessor controller allows for complete automatic processing.*
All internal surfaces are inert to CO2 and ultra pure alcohols.*
Repeatable operating parameters insuring reproducibility of results.*
LED's instantly indicate process mode at a glance.*
Integrated temperature controls.*
Processes up to 5 x 6" (150mm) diam. wafers per run; comes with additional HF compatible wafer holders to process 5 x 4" (100mm), 5 x 3" (75mm), 5 x 2" (50mm) diameter wafers or 5 x 10mm square die (Tousimis HF compatible Wafer Holders* can be used to transport and process your wafers and die from HF).
All electronic components meet CE, UL and/or U.S. Military Specifications.
Internal rupture disc built in for safety.*
Static pressure control module pre-set for automatic safe pressure stability.
An efficient adiabatic cooling system*, capable of cooling the chamber from ambient room temperature to near 0°C, in less than 3 minutes, maintains temperature automatically during both FILL and PURGE modes.*
For added safety and convenience, U.S. Patented SOTER™ Condenser* quietly captures exhaust and alcohols.
Under-lit chamber with viewing window facilitates operator chamber status viewing.
0.08µm internal filtration system delivers clean filtered LCO2 to process chamber.*
Unique chamber inserts* allow variance of chamber I.D. This maximizes efficiency in LCO2 consumption and processing time.

Cabinet: 14.25" (36.2cm) Width x 11.75" (29.8cm) Height x 25" (63.5cm) Length
System Set-Up Area Required: 42" (107cm) Width x 30" (76cm) Depth.
Chamber size: 6.50" I.D. x 1.25" Depth. Chamber Volume: 679 ml
Temperature gauge range: -30°C to 60°C, Pressure gauge range: 0 to 2,000psi
120V/50-60Hz (Other voltage units also available. Please Inquire)
LCO2 flow is controlled through Micro Metering Valves with Vernier handles for easily controlled flow rates.*

LCO2 High Pressure braided stainless steel inert Teflon® lined hose. 10ft (~3m) long for clean room operation (at a nominal charge, other lengths available upon request).
Double T-Filter Assembly (#8785) pre-installed onto the chamber LCO2 supply high-pressure hose. Flows LCO2 twice thru 0.5µm filters with 99.5% particulate retention prior to LCO2 entering Automegasamdri®-915B.
New SOTER™ Condenser* connects to exhaust hose. Captures all alcohol and deadens exhaust noise.*
Static free Exhaust Tubing for all exhaust outlets.
Internal stainless and nickel scintered filtration systems incorporated to protect lines, wafers, and valves down to 0.08µm.
Spare Chamber O-ring (3), Chamber Lamp (1), and 5A Slo-Blow Fuses (2).
4 Chamber Inserts.* Enables original chamber ID reduction down to smaller chamber ID sizes for a range including: 6", 4", 3", 2", and 1.25" !
6" (150mm), 4" (100mm), 3" (75mm), 2" (50mm) diameter Wafer Holders and 10mm square die holders included. Holders are HF compatible and can hold up to 5 wafers or die each.
Free lifetime technical support consultation by our scientific staff.
2 year warranty on all parts and labor.

8760-02: :KNURL NUT for 4" and 6" Process Chamber
8760-40: :5 AMP FUSE for SAMDRI® Models: PVT-3D, 795, 815, 815B, 915B (Series A & Series B Only)
8770-10: :CHAMBER LAMP, 120Volt/60Hz
8770-32: :HIGH-PRESSURE HOSE, 5ft
8770-33: :HIGH-PRESSURE HOSE, 10ft
8770-70: :CHAMBER LID for 6" Process Chamber
8785: :Double T-Filter Assembly
8770-83B: :0.5µm Stainless Steel Particulate Filter Element for LCO2 T-Filter or External Purge Line Filter.
8784-05: :Gasket for LCO2 Tank Connect
8770-51T/915B: :O-Ring for Automegasamdri®-936 and Automegasamdri®-915B
8770-47: :Flow Meter - Use with Automegasamdri®-936 and Automegasamdri®-915B (100 SCFH)
8770-53: :POWER CABLE
8770-54: :LCO₂ TANK SCALE W/ REMOTE DISPLAY
8770-56A: :Step-Down Transformer, 200-240V → 110-120V, 3000W
8770-83A: :Internal 0.5µm 316SS Particulate Line Filter
8768A: :6" - 150mm HF Compatible Wafer Holder
Holds 5 Wafers
8768F: :5" - 125mm HF Compatible Wafer Holder
Holds 5 Wafers
8768B: :4" - 100mm HF Compatible Wafer Holder
Holds 5 Wafers
8768C: :3" - 75mm HF Compatible Wafer Holder
Holds 5 Wafers
8768D: :2" - 50mm HF Compatible Wafer Holder
Holds 5 Wafers
8768G: :1" - 25mm HF Compatible Wafer Holder
Holds 5 Wafers
8768E: :10mm Square HF Compatible Chip Holder, Holds 5 Die

Automegasamdri®-915B, Series B